Mechanical Platforms

Mechanical Platforms for QuantumScopeTM and InfraScopeTM systems:

QuantumScopeTM and InfraScopeTM systems can be configured with a variety of sensors and optics matching a particular customer’s investigation requirements.  Both system families can also be integrated onto mechanical platforms supporting specific application requirements. Different laboratory environments and applications drive customers to seek different mechanical platforms for  optical path support and DUT interface.  QFI has designed a family of standard mechanical platforms, which address the majority of application requirements.  If customer requirements diverge from standard solutions, QFI will design custom mechanical platforms and analytical solutions for such unique requirements.

All QFI systems are shipped with computer, monitor and OptoVision software pre-installed and configured.  OptoVision is a process oriented user interface to maximize performance with minimal user input.

Probe Station Platform:

QFI’s most common configuration for a semiconductor failure analysis laboratory is a QuantumScopeTM integrated to a probe station platform.  The ability to easily interface a broad range of applications (singulated die, packaged devices, wafer fragments, full wafers) is a key driver in the prevalence of probe stations in FA laboratories.  QFI is very much a vertical manufacturer.  By designing and manufacturing their own probe station, QFI does not have to trade off capabilities  for applications outside of Failure Analysis/IC Debug and Temperature Measurement.  The QFI probe station  can be equipped for front side or backside probing Ergonomics and user access are primary objectives in the design of the backside probing option.

Probe station platforms can hold up to 7 sensors.  Automated and manual stages are available. The Light tight enclosure (with a simple flip-up door) and vibration isolation table are standard.

LabWalkerTM Platform:

Perhaps the most obvious aspect of a LabWalkerTM solution is that the configuration is portable.  The small size of the platform allows it to be placed in any convenient location, including on top of a probe station or ATE test head. If the system will be used for dynamic XIVATM LSIM work with an ATE system as well as for field returns to the Failure Analysis Lab, the LabWalkerTM may be an ideal solution. The modest footprint allows additional equipment to be placed close to the test device. The LabWalkerTM platform can hold one-to- three sensors. The associated optical heads include integrated macro lens capability. Automated XYZ staging is standard.

Docking Platforms:

Any combination of sensors, which can be installed into a laboratory or benchtop system can also be installed in a tester-dedicated system.  Primary applications for these so-called ATE docking systems are in support of dynamic failure analysis investigations.  Some IC failures only manifest themselves in a dynamic mode.  Soft Defect Localization (SDL) is a LSIM technique, which has become a widely used and even more widely written about in the trade press over the last few years. In SDL, QFI’s XIMATM LSIM system monitors pass-fail response in a tester loop.  The pixel dwell time is synchronized so that the laser dwells on a given pixel while the test vectors of interest are looped on the device. Pixel location of the laser at change of  pass/fail state is painted to the XIVA image in the same manner that a change of Current or Voltage can be tracked in static applications of LSIM.   ATE docking solutions are available in Upright Docking and Inverted Docking configurations to match specific test head requirements.  The Upright version docks to the test head from above.  Inverted docking solutions dock to a test head from below.  There is some level of customization involved in docking solutions for proper interface to ATE.

Basic Microscope Platform:

In simple laboratory set-ups, QFI can configure single or dual sensor optical heads onto microscope platforms.  QFI offers both manual and programmable stages.

You are welcome to request additional information via the information request link:

 Information Request