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IC Failure Analysis Microscopy > InfraScope Hot Spot Detection> Emissivity Correction | |||||||
EXCLUSIVE TO INFRASCOPE - EMISSIVITY CORRECTION
This makes a tremendous difference on the infrared hot spot detection images seen below. Each image is taken under identical conditions through the silicon from the backside, with 300 milliamps applied current. The lower left image is the difference in infrared radiance from the part when it is powered and unpowered. Notice the many false readings that occur from dust and defects on the backside surface, and the lack of contrast at the hot spot. Notice to the false heating apparent in the package at the top. On the image at right the InfraScope has corrected the emissivity in real time and the actual temperature of the part under power is shown. The contrast is much better and the true locations of the resistive heating is clearly visible. Only the InfraScope offers this option.
The sample was supplied by Philips Research, Eindhoven, through the courtesy of Mssrs. Martijn Goossens and Victor Zieren. The sample is decapsulated on both sides. The process is six-metal-layer (copper), on a 10 Ohm.cm p-epi silicon substrate, thinned to 102 um. EXCLUSIVE TO INFRASCOPE - TRUE TEMPERATURE |
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