IC Failure Analysis Microscopy > InfraScope Hot Spot Detection> Emissivity Correction

EXCLUSIVE TO INFRASCOPE - EMISSIVITY CORRECTION

INFRASCOPE III

QFI’s InfraScope is the only infrared thermal microscope with automatic emissivity correction. Emissivity is the material property that governs how strongly a material will emit infrared radiation at any temperature. Some materials, like metals, emit very little infrared compared to bulk semiconductor. The infrared image at right is not powered, and every material is at the same temperature. All of the image contrast is due to material emissivity differences. These emissivity differences can mask shorts, making them impossible to detect. For example a very hot spot covered by a metal may emit very little, whereas another area, only incidentally heated but with high emissivity may emit prodigiously. The FA worker will erroneously believe the short is at the high emissivity area. The InfraScope is the only infrared microscope with algorithms that automatically correct emissivity in real time at each pixel to give true temperature images. No simple algorithms find hot spots so effectively.

A lot of infrared contrast in an ordinary device due to material "emissivity". This disguises hot spot signatures.

This makes a tremendous difference on the infrared hot spot detection images seen below. Each image is taken under identical conditions through the silicon from the backside, with 300 milliamps applied current. The lower left image is the difference in infrared radiance from the part when it is powered and unpowered. Notice the many false readings that occur from dust and defects on the backside surface, and the lack of contrast at the hot spot. Notice to the false heating apparent in the package at the top. On the image at right the InfraScope has corrected the emissivity in real time and the actual temperature of the part under power is shown. The contrast is much better and the true locations of the resistive heating is clearly visible. Only the InfraScope offers this option.

Conventional Delta Radiance
Technique Obscures Hot Spot
InfraScope True Temperature
Technique Reveals Hot Spots

The sample was supplied by Philips Research, Eindhoven, through the courtesy of Mssrs. Martijn Goossens and Victor Zieren. The sample is decapsulated on both sides. The process is six-metal-layer (copper), on a 10 Ohm.cm p-epi silicon substrate, thinned to 102 um.

EXCLUSIVE TO INFRASCOPE - TRUE TEMPERATURE

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