Emmi Photon Emission Detection
| Electrical test patterns for integrated circuits show that the circuit is defective, but how to physically locate the defect so it can be analyzed? Often the first tool to turn to is the emission microscope. Many defects in integrated circuits emit light due to unwanted electron-hole recombination. If a failure analysis engineer can locate the emitted light, he can isolate the failure and determine the root cause. However the light emitted is often very faint and the failure site may be exceedingly small. QFI's emmi photo-emission microscope is equipped with extremely sensitive detectors and lenses, and housed in light tight enclosures. The detectors are cooled to reduce noise and dark-current and they are capable of detecting the faintest emissions. QFI acquired the technology rights and original patents for emission microscopy at our founding. We have well over a hundred man-years of infrared and optical instrument R&D experience and we are constantly improving and innovating new solutions for semiconductor failure analysis microscopy. |  |
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The emmi is available on a dedicated optical head as pictured at right (shown with QFI’s LN2 cooled infrared detector dewar – SWIR or MWIR options), or the emmi is may be fielded on QFI's Multi Sensor Platform as seen at left. In the left photo the emmi camera is a Back Illuminated Si CCD option mounted at the extreme left, followed by a navigation camera, then the LSIM and finally the InfraScope Thermal Hot Spot Detector at far right. |
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